NO2 gas sensor made of porous MoO3 sputtered films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 1 B, 2005, Pages 792-795

  Yamazaki, Toshinari ^a   Jin, Chengji ^a   Nakayama, Atsushi ^a   Ito, Koji ^a   Yoshizawa, Toshio ^a   Kikuta, Toshio ^a   Nakatani, Noriyuki ^a   Yamabuchi, Tatsuo ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

Gas sensor; Molybdenum trioxide; NO2; Porous film; Sputtering

Indexed keywords

ANNEALING; CHEMICAL SENSORS; HIGH PRESSURE EFFECTS; METALLIC FILMS; MOLYBDENUM COMPOUNDS; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SPUTTERING; X RAY DIFFRACTION ANALYSIS;

MOLYBDENUM TRIOXIDE; NO2; POROUS FILMS; SUBSTRATE TEMPERATURES;

NITROGEN COMPOUNDS;

EID: 17044371954     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.44.792     Document Type: Conference Paper

References (25)

1. L. Shi, Y. Hasegawa, T. Katsube, K. Onoue and K. Nakamura: Sensor Actuat. B 99 (2004) 361.
2. T. K. H. Starke, G. S. V. Coles and H. Ferkel: Sensor Actuat. B: 85 (2002) 239.
3. A. Karthigeyan, R. P. Gupata, K. Scharnagl, M. Burgmair, M. Zimmer, S. K. Sharma and I. Eisele: Sensor Actuat. B 78 (2001) 69.
4. B. Ruhland, T. Becker and G. Müller: Sensor Actuat. B 50 (1998) 85.
5. L. G. Teoh, Y. M. Hon, J. Shieh, W. H. Lai and M. H. Hon: Sensor Actuat. B 96 (2003) 219.
6. M. Penza, M. A. Tagliente, L. Mirenghi, C. Gerardi, C. Martucci and G. Cassano: Sensor Actuat. B 50 (2000) 9.
7. C. Cantalini, H. T. Sun, M. Faccio, M. Pelino, S. Santucci, L. Lozzi and M. Passacantando: Sensor Actuat. B 31 (1996) 81.
8. G. Sberveglieri, L. Depero, S. Groppelli and P. Nelli: Sensor Actuat. B 26 (1995) 89.
9. M. Akiyama, J. Tamaki, N. Miura and N. Yamazoe: Chem. Lett. 6 (1991) 1611.
10. A. K. Prasad and P. I. Gouma: J. Mater. Sci. 38 (2003) 4347.
11. M. Ferroni, V. Guidi, G. Martinelli, M. Sacerdoti, P. Nelli and G. Sberveglieri: Sensor Actuat. B 48 (1998) 285.
12. R. Dolbec, M. A. El Khakani, A. M. Serventi and R. G. Saint-Jacques: Sensor Actuat. B 93 (2003) 566.
13. G. Carbajal-Franco, A. Tiburcio-Silver, J. M. Domínguez and A. Sánchez-Juárez: Thin Solid Films 373 (2000) 141.
14. T. Yamazaki, T. Shimazaki, K. Tereyama, N. Nakatani and G. A. Mohamed: J. Mater. Sci. Lett. 17 (1998) 891.
15. M. Di Giulio, G. Micocci, R. Rella, P. Siciliano and A. Tepore: Sensor Actuat. B 23 (1995) 193.
16. S. S. Sunu, E. Prabhu, V. Jayaraman, K. I. Gnanasekar and T. Gnanasekaran: Sensor Actuat. B 94 (2003) 189.
17. A. K. Prasad, P. I. Gouma, D. J. Kubinski, J. H. Visser, R. E. Soltis and P. J. Schmitz: Thin Solid Films 436 (2003) 46.
18. O. M. Hussain and K. S. Rao: Mater. Chem. Phys. 80 (2003) 638.
19. D. Mutschall, K. Holzner and E. Obermeier: Sensor Actuat. B 36 (1996) 320.
20. E. Comini, G. Faglia, G. Sberveglieri, C. Cantalini, M. Passacantando, S. Santucci, Y. Li, W. Wlodarski and W. Qu: Sensor Actuat. B 68 (2000) 168.
21. A. Taurino, M. Catalano, P. Siciliano, E. Comini and G. Sberveglieri: Sensor Actuat. B 92 (2003) 286.
22. C. Imawan, H. Steffes, F. Solzbacher and E. Obermeier: Sensor Actuat. B 78 (2001) 119.
23. J. A. Thornton: J. Vac. Sci. & Technol. A 4 (1986) 3059.
24. J. A. Thornton: J. Vac. Sci. & Technol. 11 (1974) 666.
25. H. Zhang, I. Yoshimura, E. Kusano, T. Kogure and A. Kinbara: J. Vac. Soc. Jpn. 47 (2004) 82 [in Japanese].