Formation of carbon nano-flakes by RF magnetron sputtering method

Shinku/Journal of the Vacuum Society of Japan

Volumn 47, Issue 2, 2004, Pages 82-86

  Zhang, Hui ^b   Yoshimura, Isao ^a   Kusano, Eiji ^a   Kogure, Toshihiro ^c   Kinbara, Akira ^a  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b XI'AN JIAOTONG UNIVERSITY   (China)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; GAS FUELS; GRAPHITE; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANO FLAKES; GRAPHITE SHEETS; SPUTTERING CHAMBER;

NANOSTRUCTURED MATERIALS;

EID: 17044409715     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.47.82     Document Type: Article

References (7)

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