Carbon material deposition by remote RF plasma beam

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 238-243

  Mitu, B ^a   Vizireanu, S ^a   Petcu, C ^a   Dinescu, G ^a   Dinescu, M ^a   Birjega, R ^b   Teodorescu, V S ^c  

^a NATIONAL INSTITUTE FOR LASER   (Romania)

^b ZECASIN SA   (Romania)

^c NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

Carbon material; Emission spectroscopy; Hydrogenated nitrogenated carbon films; Remote plasma deposition

Indexed keywords

CHEMICAL BONDS; CRYSTAL STRUCTURE; DEPOSITION; EMISSION SPECTROSCOPY; HYDROGENATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

NITROGENATION;

CARBON;

PLASMA TREATMENT;

EID: 16744365632     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.147     Document Type: Article

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