A modular fabrication concept for microoptical systems

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 643-647

  Mohr, Jürgen A ^a   Last, Arndt ^a   Hollenbach, Uwe ^a   Oka, Toru ^b   Wallrabe, Ulrike ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

LIGA process; Microoptical system; Microoptics; Microspectrometer; Molding; Optical sensor; Polymer

Indexed keywords

ELECTROOPTICAL EFFECTS; FABRICATION; LENSES; MIRRORS; OPTICAL SENSORS; OPTICAL SYSTEMS;

MICROOPTICAL DISTANCE SENSORS;

MICROOPTICS;

EID: 0038631850     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.809578     Document Type: Conference Paper

References (5)

1. C. Marxer and N. F. de Rooij, "Microopto-mechanical 2×2 switch for single mode fibers based on a plasma-etched silicon mirror and electrostatic actuation," J. Lightwave Technol., vol. 17, pp. 2-6, Jan. 1999.
2. M. C. Wu, L. Y. Lin, S. S. Lee, and C. R. King, "Free-space integrated optics realized by surface-micromachining," Int. J. High Speed Electron. Syst., vol. 8, no. 2, pp. 283-297, 1997.
3. J. Mohr, "LIGA - A technology for fabricating microstructures and microsystems," Sensors Mater., vol. 10, pp. 363-373, 1998.
4. T. Oka, H. Nakajima, A. Shiratsuki, M. Tsugai, U. Wallrabe, U. Hollenbach, P. Krippner, and J. Mohr, "Development of a microoptical distance sensor with electrical I/O interface," in Proc. Tranducers '01, June 2001, pp. 536-539.
5. P. Krippner, T. Kühner, J. Mohr, and V. Saile, "Microspectrometer system for the near infrared wavelength range based on LIGA technology," Proc. SPIE, vol. 3912, p. 141, 2000.