Detection of hydrocarbon species using silicon MOS capacitors operated in a non-stationary temperature pulse mode

Sensors and Actuators, B: Chemical

Volumn 106, Issue 2, 2005, Pages 489-497

  Kreisl, P ^a   Helwig, A ^a   Friedberger, A ^a   Muller G ^a   Obermeier, E ^b   Sotier, S ^c  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c MUNICH UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Hydrocarbon gas sensor; Low power consumption; Metal insulator semiconductor; Micro hotplate; Micromachining; Non stationary mode of operation; Silicon on insulator

Indexed keywords

ELECTRIC POWER UTILIZATION; ELECTRODES; HYDROCARBONS; MICROMACHINING; SILICON; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY;

HYDROCARBON GAS SENSOR; LOW POWER CONSUMPTION; METAL-INSULATOR-SEMICONDUCTOR; MICRO-HOTPLATE; NON-STATIONARY MODE OF OPERATION;

MOS CAPACITORS;

EID: 16644371622     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.07.030     Document Type: Article

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