Response mechanism of SiC-based MOS field-effect gas sensors

IEEE Sensors Journal

Volumn 2, Issue 5, 2002, Pages 394-402

  Schalwig, Jan ^a   Kreisl, Patrick ^a   Ahlers, Simon ^a   Müller, Gerhard ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; ELECTROCHEMICAL ELECTRODES; MOSFET DEVICES; PLATINUM; POLYCRYSTALLINE MATERIALS; POROSITY; SILICON CARBIDE;

CATALYTIC ACTIVITY; GAS RESPONSE MEASUREMENTS; HYDROGEN SENSITIVITY; METAL OXIDE MATERIALS;

CHEMICAL SENSORS;

EID: 1542627563     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2002.806214     Document Type: Article

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