Combination of LIGA with other microstructure technologies

Microsystem Technologies

Volumn 2, Issue 4, 1996, Pages 162-166

  Menz, W ^a   Bacher, W ^a   Bier, W ^a   Hagena, O F ^a   Mohr, J ^a   Seidel, D ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1642616582     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050036     Document Type: Article

References (10)

1. Ruprecht R; Bacher W; Both A; Duiglreiter H; Kalb H (1993) Darstellung einfacher Mikrosysteme durch Kunststoffabformung und Galvanoformung auf integrierten Schaltkreisen, KfK-Bericht 5238: 120-126
2. Both A; Bacher W; Ruprecht R (1995) Quasimonolithic Integration of LIGA Microstructures and Microelectronic Circuits. Sensors and Materials, in press
3. Both A; Bacher W; Heckele M; Müller KD; Ruprecht R; Strohrmann M (1995) Molding Process with High Alignment Precision for the LIGA Technology, Proc. MEMS'95, Amsterdam: 186-190
4. Both A; Bacher W; Heckele M; Müller KD; Strohrmann M (1995) Fabrication of LIGA Acceleration Sensors by Aligned Molding. High Aspect Ratio of Microstructure Technology 1995 (HARMST '95), this issue
5. Müller C; Mohr J (1993) Microspectrometer Fabricated by the LIGA Process, Interdisciplinary Science Reviews 18(3): 273-279
6. Bacher W; Hagena OF; Heckele M; Müller C (1995) Small-Scale Series Production of LIGA Microspectrometer Components. High Aspect Ratio Microstructure Technology 1995 (HARMST'95), this issue
7. Büstgens B; Bacher W; Bier W; Ehnes R; Maas D; Ruprecht R; Schomburg WK (1994) Micromembrane Pump Manufactured by Molding. Proc. Actuator '94, Bremen: 86-90
8. Schaller Th; Bier W; Linder G; Schubert K (1995) Realisation of Microstructured Mould Inserts Using Mechanical Microengineering Methods. High Aspect Ratio Microstructure Technology 1995 (HARMST '95), this issue
9. Schomburg WK; Büstgeos B; Fahrenberg J; Maas D (1994) Components for Microfluidic Handling Modules, in: Van den Berg, A; Bergveldt, P. (eds.) Micro Total Analysis Systems, Proc. μTAS Workshop '94, Twente, pp 255-257. Dordrecht/Boston/ London: Kluwer Academic Publishers
10. Hoffmann W; Bruns M; Büstgens B; Bychkov E; Eggert H; Keller W; Maas D; Rapp R; Ruprecht R; Schomburg W; Süß W (1994) Elektrochemicai Microanalytical System for Ionometric Measurements, in: Van den Berg, A; Bergveldt, P (eds.) Micro Total Analysis Systems, Proc. μTAS Workshop'94, Twente, pp 215-217. Dordrecht/Boston/London: Kluwer Academic Publishers