Lift-off methods for MEMS devices

Materials Research Society Symposium - Proceedings

Volumn 729, Issue , 2002, Pages 47-56

  Chang, Shih Chia ^a   Kempisty, Jeffrey M ^a  

^a DELPHI CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; FLUOROCARBONS; MIXTURES; OXYGEN; PHOTORESISTS; PLASMA ETCHING; THERMAL EFFECTS; THICKNESS MEASUREMENT;

LIFT OFF METHODS; TRILEVEL RESIST;

MICROELECTROMECHANICAL DEVICES;

EID: 0036929053     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/proc-729-u2.3     Document Type: Article

References (9)

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