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Volumn 37, Issue 5, 2004, Pages 744-747
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Evaluating the residual stress in PbTiO3 thin films prepared by a polymeric chemical method
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Author keywords
[No Author keywords available]
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Indexed keywords
CURIE TEMPERATURE;
POLYMERIC CHEMICAL METHOD;
FERROELECTRIC THIN FILMS;
LIGHT POLARIZATION;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
PERMITTIVITY;
PHASE TRANSITIONS;
PLATINUM;
RAMAN SCATTERING;
RESIDUAL STRESSES;
SILICON;
THERMAL EXPANSION;
THERMAL STRESS;
X RAY DIFFRACTION ANALYSIS;
LEAD COMPOUNDS;
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EID: 1642619038
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/37/5/015 Document Type: Article |
Times cited : (16)
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References (31)
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