Meshing approach in non-linear FEM analysis of microstructures under electrostatic loads

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 216-225

  Soma A ^a   De Bona, F ^a,b,c   Gugliotta, A ^a   Mola, E ^a  

^a POLITECNICO DI TORINO   (Italy)

^b UNIVERSITY OF UDINE   (Italy)

^c SINCROTRONE TRIESTE   (Italy)

Author keywords

Electromechanical coupling; FEM; Infinite mapped element; Mesh morphing

Indexed keywords

CANTILEVER BEAMS; COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; LOADS (FORCES); MICROSTRUCTURE;

ELECTROMECHANICAL COUPLING; MESH MORPHING;

ELECTROMECHANICAL DEVICES;

EID: 0034874620     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425377     Document Type: Article

References (11)

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