MODELING, SIMULATION AND TESTING OF NON-LINEAR RESONANCE BEHAVIOR IN MEMS TORSIONAL MIRRORS WITH MECHANICALELECTROSTATIC COUPLING

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 143-150

  Rensing, Noa M ^a   Dodson, Stuart ^b   Adams, George G ^c   Zavracky, Paul M ^c   McClelland, Robert W ^d   Lemoncelli, Anthony ^c  

^a MicroOptical Corporation   (United States)

^b NORTHEASTERN UNIVERSITY   (United States)

^c Northeastern University   (United States)

^d The MicroOptical Corporation

Author keywords

[No Author keywords available]

Indexed keywords

MIRRORS; NICKEL; RESONANCE;

ANGULAR DISPLACEMENT; AT RESONANCE; MEMS MICROMIRROR; MODEL TESTING; MODELING RESULTS; MODELING SIMULATION; NANO-CRYSTALLINE NICKEL; NONLINEAR EFFECT; NONLINEAR RESONANCE; SIMULATION AND TESTING;

NANOCRYSTALS;

EID: 1642616568     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0259     Document Type: Conference Paper

References (6)

1. U.S. Patent number 4,317,611 and K. E. Peterson, “Silicon torsional scanning mirror,” IBM J. Res Dev., 24(5), 1980. pp. 63 1-637.
2. H. Toshiyoshi and H. Fujita, “Electrostatic micro torsion minors for an optical switch matrix”, J. MEMS, 5(4) 1996. pp. 231-237.
3. M. Fischer, “Electrostatically deflectable polysilicon torsional mirrors.” Sensors and Actuators 44(1), 1996. pp. 372-374.
4. Ugural, S.K., and Fenster, A.C., 1995, Advanced Strength and Applied Elasticity, third edition, PTR Prentice Hall, Englewood Cliffs, New Jersey.
5. Reissner, E., 1957, “Finite Twisting and Bending of Thin Rectangular Plates,” ASME Journal of Applied Mechanics, Vol, 24, pp. 391-396.
6. El-Sherik, A.M, U. Erb, G. Palumbo and K.T Aust, “Deviation from Hall-Petch behavior in as-prepared nanocrystalline nickel,” Scripta Metal, et Mat. Vol. 27 1992 pp. 1185-88.