Chemical phase separation in Zr silicate alloys: A spectroscopic study distinguishing between chemical phase separation with different degree of micro- and nano-crystallinity

Microelectronic Engineering

Volumn 72, Issue 1-4, 2004, Pages 304-309

  Rayner Jr , G B ^a   Kang, D ^a   Hinkle, C L ^a   Hong, J G ^a   Lucovsky, G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Chemical phase separation; High K dielectrics; Infrared and X ray spectroscopy

Indexed keywords

CRYSTALLIZATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PERMITTIVITY; PHASE SEPARATION; SILICA; SPECTROSCOPIC ANALYSIS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIA;

CHEMICAL PHASE SEPARATION;

ZIRCONIUM ALLOYS;

EID: 1642587346     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2004.01.008     Document Type: Conference Paper

References (9)

1. Rayner G.B. Jr., Therrien R., Lucovsky G. MRS Symp. Proc. 611:2001;c13.1.
2. Rayner G.B. Jr., Kang D., Zhang Y., Lucovsky G. J. Vac. Sci. Technol. B. 20:2002;1748.
3. Maria J.P., Wicaksana D., Kingon A.I., Busch B., Schulte H., Garfunkel E., Gustafsson T. J. Appl. Phys. 90:2000;3476.
4. Wilk G.D., Wallace R.M., Anthony J.M. J. Appl. Phys. 87:2001;484.
5. Wilk G.D., Wallace R.W., Anthony J.M. J. Appl. Phys. 89:2001;5243.
6. Lucovsky G., Rayner G.B. Jr., Kang D., Appel G., Johnson R.S., Zhang Y., Sayers D.E., Ade H., Whitten J.L. Appl. Phys. Lett. 79:2001;1775.
7. Rayner G.B. Jr., Kang H., Lucovsky G. J. Vac. Sci. Technol. B. 21:2003;1783.
8. Lucovsky G., Zhang Y., Rayner G.B. Jr., Appel G., Ade H., Whitten J.L. J. Vac. Sci. Technol. B. 20:2002;1739.
9. G. Lucovsky, in Extended Abstracts of 8th Workshop in Formation, Characterization and Reliability of Ultrathin Silicon oxides, Atagawa Heights, Japan, January 24-25, 2003.