Third-generation infrared photon detectors

Optical Engineering

Volumn 42, Issue 12, 2003, Pages 3498-3516

  Rogalski, Antoni ^a  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTOCONDUCTING MATERIALS; PHOTODETECTORS; PHOTODIODES; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WELLS; VAPOR PHASE EPITAXY;

MULTIELEMENT DETECTORS; QUANTUM WELL PHOTOCONDUCTORS;

INFRARED DETECTORS;

EID: 1642387683     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1625377     Document Type: Article

References (58)

1. P. R. Norton, "Infrared detectors in the next millennium," Proc. SPIE 3698, 652-665 (1999).
2. P. Norton, J. Campbell, S. Horn, and D. Reago, "Third-generation infrared imagers," Proc. SPIE 4130, 226-236 (2000).
3. M. Z. Tidrow, W. A. Beck, W. W. Clark, H. K. Pollehn, J. W. Little, N. K. Dhar, P. R. Leavitt, S. W. Kennerly, D. W. Beekman, A. C. Goldberg, and W. R. Dyer, "Device physics and focal plane applications of QWIP and MCT," Opton-Electron. Rev. 7, 283-296 (1999).
4. S. D. Gunapala and S. V. Bandara, "GaAs/AlGaAs based quantum well infrared photodector focal plane arrays," in Handbook of Infrared Detection Technologies, M. Henini and M. Razeghi, Eds., pp. 83-119, Elsevier, Oxford (2002).
5. I. M. Baker, "HgCdTe 2D arrays - technology and performance limits," in Handbook of Infrared Detection Technologies, M. Henini and M. Razeghi, Eds., pp. 269-308, Elsevier, Oxford (2002).
6. A. Rogalski, "Assessment of HgCdTe photodiodes and quantum well infrared photoconductors for long wavelength focal plane arrays," Infrared Phys. Technol. 40, 279-294 (1999).
7. A. Rogalski, "Quantum well photoconductors in infrared detectors technology," J. Appl. Phys. 93, 4355-4391 (2003).
8. R. Thom, "High density infrared detector arrays," U.S. Patent No. 4,039,833 (1977).
9. I. M. Baker and R. A. Ballingall, "Photovoltaic CdHgTe-silicon hybrid focal planes," Proc. SPIE 510, 121-129 (1984).
10. L. J. Kozlowski, K. Vural, J. Luo, A. Tomasini, T. Liu, and W. E. Kleinhans, "Low-noise infrared and visible focal plane arrays," Opto-Electron. Rev. 7, 259-269 (1999).
11. R. R. Norton, "Status of infrared detectors," Proc. SPIE 3379, 102-114 (1998).
12. K. Vural, L. J. Kozlowski, D. E. Cooper, C. A. Chen, G. Bostrup, C. Cabelli, J. M. Arias, J. Bajaj, K. W. Hodapp, D. N. B. Hall, W. E. Kleinhans, G. G. Price, and J. A. Pinter, "2048×2048 HgCdTe focal plane arrays for astronomy applications," Proc. SPIE 3698, 24-35 (1999).
13. http://compoundsemiconductor.net/articles/news/6/8/5/1
14. P. Norton, "HgCdTe infrared detectors," Opto-Electron. Rev. 10, 159-174 (2002).
15. J. M. Arias, J. G. Pasko, M. Zandian, S. H. Shin, G. M. Williams, L. O. Bubulac, R. E. DeWames, and W. E. Tennant, "MBE HgCdTe heterostructure p-on-n planar infrared photodiodes," J. Electron. Mater. 22, 1049-1053 (1993).
16. M. A. Kinch, "HDVIP™ FPA technology at DRS," Proc. SPIE 4369, 566-578 (2001).
17. I. M. Baker, G. J. Crimes, J. E. Parsons, and E. S. O'Keefe, "CdHgTe-CMOS hybrid focal plane arrays - a flexible solution for advanced infrared systems," Proc. SPIE 2269, 636-647 (1994).
18. Y. Nemirovsky and G. Bahir, "Passive of mercury cadmium telluride surfaces," J. Vac. Sci. Technol. A 7, 450-459 (1989).
19. Y. Nemirovsky, N. Mainzer, and E. Weiss, "Passivation of HgCdTe," in Properties of Narrow Gap Cadmium-Based Compounds, EMIS Datareviews Series No. 10, P. P. Capper, Ed., pp. 284-290, IEE, London (1994).
20. J. F. Ameurlaire and G. D. Cohen-Solal, U.S. Patent No. 3,845,494 (1974).
21. G. D. Cohen-Solal and A. G. Lussereau, U.S. Patent No. 4,998,774 (1976).
22. B. F. Levine, "Quantum-well infrared photodetectors," J. Appl. Phys. 74, R1-R81 (1993).
23. S. D. Gunapala and K. M. S. Bandara, "Recent development in quantum-well infrared photodetectors," in Thin Films, Vol. 21, pp. 113-237, Academic Press, New York (1995).
24. S. D. Gunapala and S. V. Bandara, "Quantum well infrared photodetectors," in Handbook of Thin Devices, M. H. Francombe, Ed., Vol. 2, pp. 63-99, Academic Press, San Diego (2000).
25. C. J. Chen, K. K. Choi, M. Z. Tidrow, and D. C. Tsui, "Corrugated quantum well infrared photodetectors for normal incident light coupling," Appl. Phys. Lett. 68, 1446-1448 (1996).
26. D. Reago, S. Horn, J. Campbell, and R. Vollmerhausen, "Third generation imaging sensor system concepts," Proc. SPIE 3701, 108-117 (1999).
27. T. Tung, L. V. DeArmond, R. F. Herald, P. E. Herning, M. H. Kalisher, D. A. Olson, R. F. Risser, A. P. Stevens, and S. Tighe, "State of the art of Hg-melt LPE HgCdTe at Santa Barbara Research Center," Proc. SPIE 1735, 109-131 (1992).
28. A. Rogalski, K. Adamiec, and J. Rutkowski, Narrow-Gap Semiconductor Photodiodes, SPIE Press, Bellingham, WA (2000).
29. S. J. C. Irvine, "Metal-organic vapour phase epitaxy," in Narrow-gap II-VI Compounds for Optoelectronic and Electromagnetic Applications, P. Capper, Ed., pp. 71-96, Chapman & Hall, London (1997).
30. O. K. Wu, T. J. deLyon, R. D. Rajavel, and J. E. Jensen, "Molecular beam epitaxy of HgCdTe," in Narrow-Gap II-VI Compounds for Optoelectronic and Electromagnetic Applications, P. Capper. Ed., pp. 97-130, Chapman & Hall, London (1997).
31. x Te heterostructure detectors on silicon substrates," J. Electron. Mater. 27, 546-549 (1998).
32. T. J. DeLyon, J. E. Jensen, M. D. Gorwitz, C. A. Cockrum, S. M. Johnson, and G. M. Venzor, "MBE growth of HgCdTe on silicon substrates for large-area infrared focal plane arrays: A review of recent progress," J. Electron. Mater. 28, 705-711 (1999).
33. J. B. Varesi, A. A. Buell, R. E. Bornfreund, W. A. Radford, J. M. Peterson, K. D. Maranowski, S. M. Johnson, and D. F. King, "Developments in the fabrication and performance of high-quality HgCdTe detectors grown on 4-in. Si substrates," J. Electron. Mater. 31, 815-821 (2002).
34. R. D. Rajavel, D. M. Jamba, J. E. Jensen, O. K. Wu, P. D. Brewer, J. A. Wilson, J. L. Johnson, E. A. Patten, K. Kasai, J. T. Caulfield, and P. M. Goetz, "Molecular beam epitaxial growth and performance of integrated multispectral HgCdTe photodiodes for the detection of mid-wave infrared radiation," J. Cryst. Growth 184, 1272-1278 (1998).
35. R. D. Rajavel, D. M. Jamba, J. E. Jensen, O. K. Wu, J. A. Wilson, J. L. Johnson, E. A. Patten, K. Kasai, P. M. Goetz, and S. M. Johnson, "Molecular beam epitaxial growth and performance of HgCdTe-based simultaneous-mode two-color detectors," J. Electron. Mater. 27, 747-751 (1998).
36. M. B. Reine, A. Hairston, P. O'Dette, S. P. Tobin, F. T. J. Smith, B. L. Musicant, P. Mitra, and F. C. Case, "Simultaneous MW/LW dual-band MOCVD HgCdTe 64×64 FPAs," Proc. SPIE 3379, 200-212 (1998).
37. A. C. Goldberg, S. W. Kennerly, J. W. Little, H. K. Pollehn, T. A. Shafer, C. L. Mears, H. F. Schaake, M. Winn, M. Taylor, and P. N. Uppal, "Comparison of HgCdTe and QWIP dual-band focal plane arrays," Proc. SPIE 4369, 532-546 (2001).
38. W. Cabanski, R. Breiter, R. Koch, K.-H. Mauk, W. Rode, J. Ziegler, H. Schneider, M. Walther, and O. Oelmaier, "3rd generation focal plane array IR detection modules at AIM," Proc. SPIE 4369, 547-558 (2001).
39. W. Cabanski, R. Breiter, R. Koch, W. Gross, K.-H. Mauk, W . Rode, J. Ziegler, H. Schneider, M. Walther, and O. Oelmaier, "Third gen focal plane array IR detection modules at AIM," Infrared Phys. Technol. 43, 257-263 (2002).
40. J. P. Zanatta, P. Ferret, R. Loyer, G. Petroz, S. Cremer, J. P. Chamonal, P. Bouchut, A. Million, and G. Destefanis, "Single and two colour infrared focal plane arrays made by MBE in HgCdTe," Proc. SPIE 4130, 441-451 (2000).
41. J. L. Tissot, "Advanced IR detector technology development at CEA/LETI," Infrared Phys. Technol. 43, 223-228 (2002).
42. W. E. Tennant, M. Thomas, L. J. Kozlowski, W. V. McLevige, D. D. Edwall, M. Zandian, K. Spriosu, G. Hildebrandt, V. Gil, P. Ely, M. Muzilla, A. Stoltz, and J. H. Dinan, "A novel simultaneous unipolar multispectral integrated technology approach for HgCdTe IR detectors and focal plane arrays," J. Electron. Mater. 30, 590-594 (2001).
43. L. A. Almeida, M. Thomas, W. Larsen, K. Spariosu, D. D. Edwall, J. D. Benson, W. Mason, A. J. Dinan, "Development and fabrication of two-color mid- and short-wavelength infrared simultaneous unipolar multispectral integrated technology focal-plane arrays," J. Electron. Mater. 30, 669-676 (2002).
44. M. B. Reine, "HgCdTe photodiodes for IR detection: a review," Proc. SPIE 4288, 266-277 (2001).
45. K. Jóźwikowski and A. Rogalski, "Computer modeling of dual-band HgCdTe photovoltaic detectors," J. Appl. Phys. 90, 1286-1291 (2001).
46. W. A. Beck and T. S. Faska, "Current status of quantum well focal plane arrays," Proc. SPIE 2744, 193-206 (1996).
47. T. Whitaker, "Sanders' QWIPs detect two colors at once," Compound Semicond. 5(7), 48-51 (1999).
48. S. D. Gunapala, S. V. Bandara, J. K. Liu, E. M. Luong, S. B. Rafol, J. M. Mumolo, D. Z. Ting, J. J. Bock, M. E. Ressler, M. W. Werner, P. D. LeVan, R. Chehayeb, C. A. Kukkonen, M. Ley, P. LeVan, and M. A. Fauci, "Recent developments and applications of quantum well infrared photodetector focal plane arrays," Opto-Electron. Rev. 8, 150-163 (2001).
49. Ph. Bois, E. Costard, J. Y. Duboz, and J. Nagle, "Technology of multiquantum well infrared detectors," Proc. SPIE 764-771 (1997).
50. S. D. Gunapala, S. V. Bandara, A. Sigh, J. K. Liu, S. B. Rafol, E. M. Luong, J. M. Mumolo, N. Q. Tran, J. D. Vincent, C. A. Shott, J. Long, and P. D. LeVan, "8-9 and 14-15 μm two-color 640×486 quantum well infrared photodetector (QWIP) focal plane array camera," Proc. SPIE 3698, 687-697 (1999).
51. S. D. Gunapala, S. V. Bandar, A. Singh, J. K. Liu, B. Rafol, E. M. Luong, J. M. Mumolo, N. Q. Tran, D. Z. Ting, J. D. Vincent, C. A. Shott, J. Long, and P. D. LeVan, "640×486 long-wavelength two-color GaAs/AlGaAs quantum well infrared photodetector (QWIP) focal plane array camera," IEEE Trans. Electron Devices 47, 963-971 (2000).
52. M. Jhabvala, "Applications of GaAs quantum well infrared photoconductors at the NASA/Goddard Space Flight Center," Infrared Phys. Technol. 42, 363-376 (2001).
53. L. J. Kozlowski and W. F. Kosonocky, "Infrared detector arrays," Chap. 23 in Handbook of Optics, M. Bass, E. W. Van Stryland, D. R. Williams, and W. L. Wolfe, Eds., McGraw0Hill, New York (1995).
54. J. Bajaj, "State-of-the-art HgCdTe infrared devices," Proc. SPIE 3948, 42-54 (2000).
55. J. P. Chatard, "LW MCT IRFPA cost optimization," Proc. SPIE 3698, 407-419 (1999).
56. F. Bertrand, J. T. Tissot, and G. Destefanis, "Second generation cooled infrared detectors. State of the art and prospects," in Physics of Semiconductor Devices, Vol. II, V. Kumar and S.K. Agarwal, Eds., pp 713-720, Narosa Publishing House, New Delhi (1998).
57. H. Schneider, M. Walther, C. Schönbein, R. Rehm, J. Fleissner, W. Pletschen, J. Braunstein, P. Koidl, G. Weimann, J. Ziegler, and W. Cabanski, "QWIP FPAs for high-performance thermal imaging," Physica E (Amsterdam) 7, 101-107 (2000).
58. H. Schneider, P. Koidl, M. Walther, J. Fleissner, R. Rehm, E. Diwo, K. Schwarz, and G. Weimann, "Ten years of QWIP development at Fraunhofer," Infrared Phys. Technol. 42, 283-289 (2001).