Profile coating and its application for Kirkpatrick-Baez mirrors

Optical Engineering

Volumn 42, Issue 12, 2003, Pages 3622-3628

  Liu, Chian ^a   Assoufid, Lahsen ^a   Conley, Ray ^a   Macrander, Albert T ^a   Ice, Gene E ^b   Tischler, J Z ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ELLIPSOMETRY; SILICON WAFERS; SPECTROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; SYNCHROTRON RADIATION; THICKNESS MEASUREMENT; X RAYS;

KIRKPATRICK-BAEZ MIRROR; MICROFOCUSING; X-RAY OPTICS;

MIRRORS;

EID: 1642364891     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1625381     Document Type: Article

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