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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1421-1424

Laterally graded multilayers and their applications

(4) Liu, Chian a Macrander, A a Als Nielsen, J b Zhang, K c

a ARGONNE NATIONAL LABORATORY (United States)

b UNIVERSITY OF COPENHAGEN (Denmark)

c Illinois Institute of Technology (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; MASKS; MONOCHROMATORS; SCINTILLATION COUNTERS; SUBSTRATES; X RAY DIFFRACTION; X RAY SCATTERING;

LATERALLY GRADED MULTILAYERS;

MULTILAYERS;

EID: 0035394856 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1353536 Document Type: Article

Times cited : (19)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.