Thickness determination of metal thin films with spectroscopic ellipsometry for x-ray mirror and multilayer applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2741-2748

  Liu, Chian ^a   Erdmann, J ^a   Maj, J ^a   Macrander, A ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033424581     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581939     Document Type: Article

References (19)

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