Langmuir probe diagnostics of a microfabricated inductively coupled plasma on a chip

Journal of Applied Physics

Volumn 94, Issue 5, 2003, Pages 2821-2828

  Minayeva, Olga B ^a   Hopwood, Jeffrey ^a  

^a Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; MICROSTRUCTURE; PLASMA DENSITY; PLASMA SHEATHS; PRESSURE EFFECTS;

ELECTRON TEMPERATURE;

PLASMA DIAGNOSTICS;

EID: 0141857606     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1597976     Document Type: Article

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