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Volumn , Issue , 2004, Pages 739-746

Backend CAD flows for "restrictive design rules"

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL PROPERTIES; DATA PROCESSES; DESIGN FOR MANUFACTURABILITY (DFM); SUBWAVELENGTH TECHNOLOGIES;

EID: 16244408013     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (50)

References (13)
  • 1
    • 2942694147 scopus 로고    scopus 로고
    • DFM: Magic bullet or marketing hype?
    • May
    • J. Sawicki,"DFM: Magic bullet or marketing hype?", Proc. SPIE Vol. 5379, May, 2004.
    • (2004) Proc. SPIE , vol.5379
    • Sawicki, J.1
  • 3
    • 0035742237 scopus 로고    scopus 로고
    • Modeling of pattern dependencies for multi-level copper chemical mechanical polishing processes
    • MRS Spring Meeting, April
    • T. Tugbawa, T. Park, D. Boning, T. Pan, P. Li, S. Hymes, T. Brown, and L. Camilletti, "Modeling of Pattern Dependencies for Multi-Level Copper Chemical Mechanical Polishing Processes," CMP Symposium, MRS Spring Meeting, April 2001.
    • (2001) CMP Symposium
    • Tugbawa, T.1    Park, T.2    Boning, D.3    Pan, T.4    Li, P.5    Hymes, S.6    Brown, T.7    Camilletti, L.8
  • 4
    • 1642474031 scopus 로고    scopus 로고
    • EUVL: Transition from research to commercialization
    • C. W. Gwyn, P. J. Silverman, "EUVL: transition from research to commercialization", Proc. SPIE Vol. 5130, p. 990-1004, (2003)
    • (2003) Proc. SPIE , vol.5130 , pp. 990-1004
    • Gwyn, C.W.1    Silverman, P.J.2
  • 6
    • 84893652443 scopus 로고    scopus 로고
    • The road to better reliability and yield embedded DfM tools
    • K. Veelenturf, "The Road to better Reliability and Yield Embedded DfM Tools", Proc. SIGDA DATE 2000, p. 67
    • Proc. SIGDA DATE 2000 , pp. 67
    • Veelenturf, K.1
  • 7
    • 4444331730 scopus 로고    scopus 로고
    • Optical Proximity Correction (OPC)-friendly maze routing
    • L.Huang, M. Wong "Optical Proximity Correction (OPC)-Friendly Maze Routing", Proc. DAC 2004
    • Proc. DAC 2004
    • Huang, L.1    Wong, M.2
  • 10
    • 16244407524 scopus 로고    scopus 로고
    • Coalition seeks missing link
    • April 12
    • R. Goering, "Coalition seeks missing link", EE Times, April 12, 2004.
    • (2004) EE Times
    • Goering, R.1
  • 13
    • 0042635808 scopus 로고    scopus 로고
    • Death, taxes and failing chips
    • Anaheim, CA, June
    • C. Visweswariah, "Death, taxes and failing chips", Design Automation Conference (DAC), Anaheim, CA, pages 343-347, June 2003.
    • (2003) Design Automation Conference (DAC) , pp. 343-347
    • Visweswariah, C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.