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Volumn 5379, Issue , 2004, Pages 1-9
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DFM: Magic bullet or marketing hype
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Author keywords
DFM; EDA; OPC
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Indexed keywords
AUTOMATION;
COSTS;
OPTICAL RESOLVING POWER;
OPTIMIZATION;
PROBLEM SOLVING;
PRODUCT DEVELOPMENT;
TRANSISTORS;
DFM;
ELECTRONIC DESIGN AUTOMATION (EDA);
MAGIC BULLETS;
OPC;
SEMICONDUCTOR MATERIALS;
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EID: 2942694147
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.546792 Document Type: Conference Paper |
Times cited : (11)
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References (3)
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