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Volumn 5379, Issue , 2004, Pages 1-9

DFM: Magic bullet or marketing hype

Author keywords

DFM; EDA; OPC

Indexed keywords

AUTOMATION; COSTS; OPTICAL RESOLVING POWER; OPTIMIZATION; PROBLEM SOLVING; PRODUCT DEVELOPMENT; TRANSISTORS;

EID: 2942694147     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.546792     Document Type: Conference Paper
Times cited : (11)

References (3)
  • 1
    • 0141610700 scopus 로고    scopus 로고
    • Trends in systematic nonparticle yield loss mechanisms and the implications for IC design
    • C.N. Berglund, "Trends in systematic nonparticle yield loss mechanisms and the implications for IC design", Proc. SPE Int. Soc. Opt. Eng. 5040, 547 (2003)
    • (2003) Proc. SPE Int. Soc. Opt. Eng. , vol.5040 , pp. 547
    • Berglund, C.N.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.