Electrically-induced thermal stimuli for MEMS testing

Proceedings - Ninth IEEE European Test Symposium, ETS 2004

Volumn , Issue , 2004, Pages 60-65

  Dumas, N ^a   Azais F ^a   Latorre, L ^a   Nouet, P ^a  

^a UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEVICE UNDER TEST (DUT); ELECTROTHERMAL ACTUATION; FAULTY DEVICES; THERMAL STIMULI;

CMOS INTEGRATED CIRCUITS; FAULT TOLERANT COMPUTER SYSTEMS; HARMONIC ANALYSIS; INFRARED IMAGING; INTEGRATED CIRCUIT LAYOUT; THERMAL EFFECTS; TRANSIENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 15844384516     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ETSYM.2004.1347605     Document Type: Conference Paper

References (9)

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2. B. Charlot, S.Mir, F. Parrain and B. Courtois, "Electrically induced stimuli for MEMS self-test", in proc VLSI Test Symposium (VTS'01), pp. 210-215, Los Angeles, USA, April 29 - May 3, 2001.
3. E. S. Kolesar, P. B. Allen, J. T. Howard, J. M. Wilken and N. Boydston, "Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections", in Thin Solid Films, Volumes 355-356, pp 295-302, November 1, 1999.
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7. N. Dumas, L. Latorre, P. Nouet, "Low noise CMOS amplifier for a piezoresistive magnetic field sensor", in proc. of Conf. Design of Circuits and Integrated Systems (DCIS'03), pp. 639-644, November 2003.
8. V. Beroulle, Y. Bertrand, L. Latorre and P. Nouet "Test and testability of a monolithic MEMS for magnetic field sensing" in Journal of Electronic Testing (JETTA) , Vol. 17, no 5, pp 439-450, 2001.
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