A CMOS compatible micromachined tactile fingerprint sensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4755, Issue 1, 2002, Pages 568-575

  Parrain, Fabien ^a   Charlot, Benôit ^a   Galy, Nicolas ^a   Courtois, Bernard ^a  

^a TIMA LABORATORY   (France)

Author keywords

Biometrics; Bulk micromachining; CMOS technology; Fingerprint; Piezoresistivity

Indexed keywords

CMOS INTEGRATED CIRCUITS; IMAGE ANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SUBSTRATES;

FINGERPRINT SENSORS;

IMAGE SENSORS;

EID: 6444244740     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.462857     Document Type: Article

References (8)

1. Towards design and validation of mixed technology SOCs
2. A 600-dpi capacitive fingerprint sensor chip and image-synthesis technique
3. A New sensor structure and fabrication process for a single-chip fingerprint sensor/identifier LSI
4. Piezoresistance in polysilicon and its applications to strain gauges
5. Polycrystalline silicon strain sensors
6. A single-chip fingerprint sensor and identifier