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Volumn 479, Issue 1-2, 2005, Pages 52-58

Helium-charged titanium films deposited by direct current magnetron sputtering

Author keywords

Helium incorporation; Sputtering; Titanium; Transmission electron microscopy

Indexed keywords

BUBBLES (IN FLUIDS); GRAIN SIZE AND SHAPE; HELIUM; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SPUTTERING; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY;

EID: 15444364681     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.108     Document Type: Article
Times cited : (49)

References (18)
  • 7
    • 14344276174 scopus 로고    scopus 로고
    • ERD spectrum to depth profile conversion program for Windows. Proceeding of the 14th International Conference on the Application of Accelerators in Research and Industry, Denton, U.S.A., November 6-9, 1996
    • F. Schiettekatte, and G.G. Ross ERD spectrum to depth profile conversion program for Windows. Proceeding of the 14th International Conference on the Application of Accelerators in Research and Industry, Denton, U.S.A., November 6-9, 1996 AIP Conference Proceedings vol. 392 1997 711
    • (1997) AIP Conference Proceedings , vol.392 , pp. 711
    • Schiettekatte, F.1    Ross, G.G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.