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Volumn 11, Issue 7, 1999, Pages 867-872
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Effects of helium ion implantation on the structure of nanophase and coarse-grain titanium films
a a a a a |
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
DEPOSITION;
FILM PREPARATION;
HELIUM;
ION IMPLANTATION;
MOLYBDENUM;
NANOSTRUCTURED MATERIALS;
PROTONS;
SUBSTRATES;
TITANIUM;
TRANSMISSION ELECTRON MICROSCOPY;
ENHANCED PROTON BACK SCATTERING (EPBS);
METALLIC FILMS;
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EID: 0033340929
PISSN: 09659773
EISSN: None
Source Type: Journal
DOI: 10.1016/S0965-9773(99)00382-7 Document Type: Article |
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Times cited : (8)
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References (8)
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