X-ray characterization of buried allotaxially grown CoSi2 layers in Si(100)

Journal of Applied Physics

Volumn 83, Issue 11, 1998, Pages 5823-5830

  Zimmermann, U ^a,c   Schlomka, J P ^a   Tolan, M ^a   Stettner, J ^a   Press, W ^a   Hacke, M ^b   Mantl, S ^b  

^a UNIVERSITY OF KIEL   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542505364     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367439     Document Type: Article

References (51)

1. A. Lauwers, K. Kyllesbech Larsen, M. von Howe, R. Verbeeck, K. Maex, M. van Rossum, A. Vercaemst, R. van Meirhaeghe, and F. Cardon, J. Appl. Phys. 77, 2525 (1995).
2. S. L. Hsia, T. Y. Tan, P. Smith, and G. E. McGuire, J. Appl. Phys. 72, 1864 (1992).
3. F. Rüders, J. Kim, M. Hacke, S. Mesters, Ch. Buchal, and S. Mantl, Thin Solid Films 294, 351 (1997).
4. J. R. Jimenez, L. J. Schowalter, L. M. Hsiung, K. Rajan, S. Hashimoto, R. D. Thompson, and S. S. Iyer, J. Vac. Sci. Technol. A 8, 3014 (1990).
5. R. Stadler, C. Schwartz, H. Sirringhaus, and H. von Känel, Surf. Sci. 271, 355 (1992).
6. R. T. Tung, Appl. Surf. Sci. 117/118, 268 (1997).
7. S. Mantl, J. Phys. D 31, 1 (1998).
8. S. Mantl, Mater. Sci. Rep. 8, 1 (1992).
9. D. Bahr, W. Press, R. Jebasinski, and S. Mantl, Phys. Rev. B 47, 4385 (1993).
10. M. Müller, D. Bahr, W. Press, R. Jebasinski, and S. Mantl, J. Appl. Phys. 74, 1590 (1993).
11. S. Mantl and H. L. Bay, Appl. Phys. Lett. 61, 267 (1992).
12. P. Liu, B.-Z. Li, Z. Sun, Z.-G. Gu, W.-N. Huang, Z.-Y. Zhou, R.-S. Ni, C.-L. Lin, S.-C. Zou, F. Hong, and G. A. Rozgonyi, J. Appl. Phys. 74, 1700 (1993).
13. R. Abelès, Ann. Phys. (Paris) 5, 596 (1950).
14. L. G. Parratt, Phys. Rev. 95, 359 (1954).
15. J. Lekner, Theory of Reflection (Nijhoff, Dordrecht, 1987).
16. S. K. Sinha, E. B. Sirota, S. Garoff, and H. B. Stanley, Phys. Rev. B 38, 2297 (1988).
17. R. Pynn, Phys. Rev. B 45, 602 (1992).
18. D. K. G. de Boer, Phys. Rev. B 49, 5817 (1994).
19. D. K. G. de Boer, Phys. Rev. B 51, 5297 (1995).
20. V. Holý, J. Kuběna, I. Ohlídal, K. Lischka, and W. Plotz, Phys. Rev. B 47, 15896 (1993).
21. V. Holý and T. Baumbach, Phys. Rev. B 49, 10668 (1994).
22. S. Dietrich and A. Haase, Phys. Rep. 260, 1 (1995).
23. T. Salditt, T. H. Metzger, and J. Peisl, Phys. Rev. Lett. 73, 2228 (1994).
24. J.-P. Schlomka, M. Tolan, L. Schwalowsky, O. H. Seeck, J. Stettner, and W. Press, Phys. Rev. B 51, 2311 (1995).
25. J.-P. Schlomka, M. R. Fitzsimmons, R. Pynn, J. Stettner, O. H. Seeck, M. Tolan, and W. Press, Physica B 221, 44 (1996).
26. J. Stettner, L. Schwalowsky, M. Tolan, O. H. Seeck, W. Press, C. Schwartz, and H.v. Känel, Phys. Rev. B 53, 1398 (1996).
27. V. Nitz, M. Tolan, J.-P. Schlomka, O. H. Seeck, J. Stettner, W. Press, M. Stelzle, and E. Sackmann, Phys. Rev. B 54, 5038 (1996).
28. L. Brügemann, R. Bloch, W. Press, and M. Tolan, Acta Crystallogr., Sect. A: Found. Crystallogr. 48, 688 (1992).
29. M. Born and E. Wolf, Principles of Optics (Pergamon, Oxford, 1993).
30. R. W. James, The Optical Principles of the Diffraction of X-Rays (Ox Bow, Woodbridge, Connecticut, 1982).
31. z rather than a horizontal plateau is always observed. This purely geometrical correction is taken into account in the refinement and does not contain any information about the sample structure.
32. P. Beckmann and A. Spizzichino, The Scattering of Electromagnetic Waves From Rough Surfaces (Pergamon, New York, 1963).
33. L. Névot and P. Croce, Rev. Phys. Appl. 15, 761 (1980).
34. 2 layer on top of the sample. Both, the roughness of the underlying Si cap layer and the roughness of this interface are of the order of the layer thickness. In the refinement a continuous profile was assumed where these values are simply parameters which would have been obtained if the layers could have been treated independently.
35. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995).
36. H.-O. Peitgen, H. Jürgens, and D. Saupe, Bausteine des Chaos: Fraktale (Springer, Berlin, Heidelberg, New York, Klett-Cotta Stuttgart, 1992).
37. Y. Yoneda, Phys. Rev. 131, 2010 (1963).
38. S. R. Andrews and R. A. Cowley, J. Phys. C 18, 6427 (1985).
39. I. K. Robinson, Phys. Rev. B 33, 3830 (1986).
40. 2 unit cell.
41. H. Dosch, Critical Phenomena at Surfaces and Interfaces (Evanescent X-Ray and Neutron Scattering), Springer Tracts in Modern Physics, Vol. 126 (Springer, Berlin, 1992).
42. H. Dosch, B. W. Batterman, and D. C. Wack, Phys. Rev. Lett. 56, 1144 (1986).
43. H. Dosch, Phys. Rev. B 35, 2137 (1987).
44. J. Stettner, Ph.D. thesis, Kiel University, 1995.
45. J. Hornstra and W. Bartels, J. Cryst. Growth 44, 513 (1978).
46. D. Bahr, Ph.D. thesis, Kiel University, 1992.
47. A. Stierle, P. Bödeker, and H. Zabel, Surf. Sci. 327, 9 (1995).
48. 2 peak width. This can be seen if the Si Bragg reflection is considered. The width of this reflection was resolution limited.
49. U. Zimmermann, Diploma thesis, Kiel University, 1996.
50. S. K. Sinha, M. K. Sanyal, S. K. Satija, C. F. Majkrzak, D. A. Neumann, H. Homma, S. Szpala, A. Gibaud, and H. Morkoc, Physica B 198, 72 (1994).
51. G. Guénin, M. Ignat, and O. Thomas, J. Appl. Phys. 68, 6515 (1990).