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Volumn 221, Issue 1-4, 1996, Pages 44-52

Characterization of Si/Ge interfaces by diffuse X-ray scattering in the region of total external reflection

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTROMAGNETIC WAVE REFLECTION; ELECTROMAGNETIC WAVE SCATTERING; FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; VAPOR DEPOSITION; X RAY ANALYSIS;

EID: 0030563009     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-4526(95)00903-5     Document Type: Article
Times cited : (11)

References (35)
  • 15
    • 85030012423 scopus 로고    scopus 로고
    • note
    • z [5].
  • 16
    • 0343909645 scopus 로고
    • and references therein
    • P. Meakin, Phys. Rep. 235 (1993) 189 and references therein.
    • (1993) Phys. Rep. , vol.235 , pp. 189
    • Meakin, P.1
  • 20
    • 85030013023 scopus 로고    scopus 로고
    • note
    • In computer simulations the "finite size effect" is the limited size of the simulation. In natural growth processes these effects might be thermal fluctuations or effects of gravity. See also Ref. [16].
  • 21
    • 85030023867 scopus 로고    scopus 로고
    • note
    • In this paper the dimension n means the dimension of the grown layer on a n - 1-dimensional surface. Therefore our growth processes are 3-dimensional.
  • 35
    • 85030013486 scopus 로고    scopus 로고
    • note
    • In the refinement of sample 'SiGe3' the Si/Ge interface had unusually little influence on the calculated profile, hence the large error bars for the parameters of that interface. The origin of this effect is not quite clear. It might be due to destructive interference extinguishing the scattering contribution of that particular interface.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.