Vertical MSM photodiodes in silicon based on epitaxial Si/CoSi2/Si

Thin Solid Films

Volumn 294, Issue 1-2, 1997, Pages 351-353

  Ruders F ^a   Kim, J ^a   Hacke, M ^a   Mesters, S ^a   Buchal, Ch ^a   Mantl, S ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Epitaxy; Metals; Photodiodes; Semiconductors; Silicon

Indexed keywords

HETEROJUNCTIONS; SEMICONDUCTOR DIODES; SEMICONDUCTOR GROWTH;

MSM PHOTODIODES;

PHOTODIODES;

EID: 0343772187     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09260-7     Document Type: Article

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