Ultra-Low Temperature Poly-Si Thin Film by Excimer Laser Recrystallization For Flexible Substrates

Materials Research Society Symposium - Proceedings

Volumn 769, Issue , 2003, Pages 35-40

  Han, Sang Myeon ^a   Lee, Min Cheol ^a   Kang, Su Hyuk ^a   Shin, Moon Young ^a   Han, Min Koo ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTALLIZATION; EXCIMER LASERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROGENATION; INDUCTIVELY COUPLED PLASMA; LASER BEAM EFFECTS; LOW TEMPERATURE EFFECTS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

PHYSICAL SPUTTERING; PRECURSOR FILMS;

POLYSILICON;

EID: 1542364456     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-769-h2.3     Document Type: Conference Paper

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