Distributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 445-450

  Acar, Cenk ^a   Shkel, Andrei M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Inertial sensors; MEMS; Micromachined gyroscopes

Indexed keywords

ANISOTROPY; ASPECT RATIO; BANDWIDTH; DEGREES OF FREEDOM (MECHANICS); FREQUENCY RESPONSE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; RESIDUAL STRESSES; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS; SENSORS;

INERTIAL SENSORS; MEMS; MICROMACHINED GYROSCOPES;

GYROSCOPES;

EID: 1542363551     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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