Nano-precision control of micromirrors using output feedback

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 2003, Pages 2652-2657

  Maithripala, D H S ^a   Gale, R O ^a   Holtzt, M W ^a   Berg, J M ^a   Dayawansa, W P ^a  

^a TEXAS TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DATA STORAGE EQUIPMENT; DIGITAL DEVICES; ELECTRODES; ELECTROSTATICS; FEEDBACK CONTROL; FOURIER TRANSFORMS; LIGHT MODULATORS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTICAL CORRELATION; SYNTHETIC APERTURE RADAR; WAVELENGTH DIVISION MULTIPLEXING;

MICROMIRROR ARRAYS; SPATIAL LIGHT MODULATORS (SLM);

MICROOPTICS;

EID: 1542349006     PISSN: 07431546     EISSN: 25762370     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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