Design Optimization of Three-Axis Accelerometers Based on Four Seismic Masses

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1099-1104

  Rödjegård, Henrik ^a   Andersson, Gert ^a  

^a Imego AB The Institute of Micro and Nanotechnology   (Sweden)

Author keywords

Accelerometer design; Three axis accelerometer

Indexed keywords

ACCELERATION; FREQUENCY RESPONSE; MICROMACHINING; PHASE SHIFT; RESISTORS; SEISMOLOGY; SENSITIVITY ANALYSIS;

ACCELEROMETER DESIGN; THREE-AXIS ACCELEROMETERS;

ACCELEROMETERS;

EID: 1542331473     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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11. th edition, McGraw-Hill,1989.