Three-axes monolithic silicon low-g accelerometer

Journal of Microelectromechanical Systems

Volumn 9, Issue 4, 2000, Pages 551-556

  Bütefisch, Sebastian ^a   Schoft, Axel ^a   Büttgenbach, Stephanus ^a,b,c,d,e  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b UNIVERSITY OF BONN   (Germany)

^c CERN   (Switzerland)

^d University of Bonn ^*  (Germany)

^e Hahn Schickard Society

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION SENSOR; ANISOTROPIC WET CHEMICAL ETCHING; POTASSIUM HYDROXIDE; SILICON SPRING MASS SYSTEM;

ACCELEROMETERS; ETCHING; GRAVITATION; POTASSIUM COMPOUNDS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0034467239     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.896778     Document Type: Article

References (9)

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