|
Volumn , Issue , 2000, Pages 327-330
|
Characterization and Isolation Techniques in Silicon on Insulator Technology Microprocessor Designs
a a a a a a a
a
IBM
(United States)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
CAPACITANCE;
CMOS INTEGRATED CIRCUITS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
GALLIUM;
ION BEAMS;
MICROPROCESSOR CHIPS;
MOSFET DEVICES;
SCANNING ELECTRON MICROSCOPY;
TRANSMISSION ELECTRON MICROSCOPY;
JUNCTION CAPACITANCE;
SCANNING CAPACITANCE MICROSCOPY;
SILICON ON INSULATOR TECHNOLOGY;
|
EID: 1542330751
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
|
References (8)
|