Electrical Probing and Surface Imaging of Deep Sub-Micron Integrated Circuits

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 1999, Pages 39-45

  Krieg, Kenneth ^a   Qi, Richard ^a   Thomson, Douglas ^b   Bridges, Greg ^b  

^a Micron Force Instruments ^*  (Canada)

^b UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROBING; SIGNAL MEASUREMENT;

ATOMIC FORCE MICROSCOPY; BANDWIDTH; IMAGING SYSTEMS; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SIGNAL DETECTION; SILICON NITRIDE; SURFACE TOPOGRAPHY; VISUALIZATION; WAVEFORM ANALYSIS;

INTEGRATED CIRCUITS;

EID: 0003645340     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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3. G. Binnig and D. P. E. Smith, Rev. Sci. Instrum., 57, 1688 (1986)
4. J.F. Grifith and D.A. Grigg, J. Appl. Phys., 74, R83 (1993)
5. H. Richter, Test Chip for the Characterization of Electron Beam Measurement Systems, Microelectronic Engineering, 16, 225-232 (1992