Radical Copolymerization of 2-Trifluoromethylacrylic Monomers. I. Kinetics of Their Copolymerization with Norbornenes and Vinyl Ethers as Studied by in situ 1H NMR Analysis

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 42, Issue 6, 2004, Pages 1468-1477

  Ito, Hiroshi ^a   Miller, Dolores C ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

2 trifluoromethylacrylate; Copolymerization kinetics; Fluoropolymers; Lithography; Norbornenes; Radical polymerization; Resists; Vinyl ethers

Indexed keywords

COPOLYMERIZATION; COPOLYMERS; DERIVATIVES; ETHERS; FLUORINE CONTAINING POLYMERS; HOMOPOLYMERIZATION; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PHOTOLITHOGRAPHY; REACTION KINETICS; TERPOLYMERIZATION;

2-TRIFLUOROMETHYLACRYLATE; COPOLYMERIZATION KINETICS; MONOMER REACTIVITY RATIOS; NORBORNENES; PENULTIMATE MODEL; POLYMER RESISTS; RADICAL POLYMERIZATION; TERMINAL MODEL; VINYL ETHERS;

ACRYLIC MONOMERS;

FLUOROPOLYMER;

EID: 1542305695     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/pola.20004     Document Type: Article

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