Glow Characterization in Direct Current Plasma Polymerization of Trimethylsilane

Journal of Polymer Science, Part A: Polymer Chemistry

Volumn 42, Issue 5, 2004, Pages 1042-1052

  Yu, Q S ^a   Huang, C ^a   Yasuda, H K ^a  

^a University of Missouri   (United States)

Author keywords

Cathode glow; Dc glow discharge; Dissociation glow; Negative glow; Optical emission spectroscopy; Plasma polymerization; Thin film; Trimethylsilane; UV vis spectroscopy

Indexed keywords

CATHODES; DEPOSITION; DISSOCIATION; GLOW DISCHARGES; IONIZATION; LIGHT EMISSION; MOLECULAR STRUCTURE; PLASMA DIAGNOSTICS; PLASTIC FILMS; SILANES; THIN FILMS; ULTRAVIOLET SPECTROSCOPY;

CATHODE GLOW; DC GLOW DISCHARGE; DISSOCIATION GLOW; NEGATIVE GLOW; OPTICAL EMISSION SPECTROSCOPY; TRIMETHYLSILANE;

PLASMA POLYMERIZATION;

POLYMERIZATION;

EID: 1542304541     PISSN: 0887624X     EISSN: None     Source Type: Journal    
DOI: 10.1002/pola.11038     Document Type: Article

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