DC plasma polymerization of hexamethyldisiloxane

Plasma Chemistry and Plasma Processing

Volumn 17, Issue 2, 1997, Pages 123-154

  Van Ooij, W J ^a   Eufinger, S ^b   Guo, Sheyu ^a  

^a University of Cincinnati   (United States)

^b UNIVERSITY OF CINCINNATI   (United States)

Author keywords

DC plasma; DC reactor; Hexamethyldisiloxane; Plasma polymerization

Indexed keywords

EID: 0031505708     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02766811     Document Type: Article

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