Effect of magnetic field configuration in the cathodic polymerization systems with two anode magnetrons

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2062-2066

  Zhao, J G ^a   Yasuda, H K ^a  

^a University of Missouri   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; DEPOSITION; GLOW DISCHARGES; MAGNETIC FIELD EFFECTS; MAGNETRONS; PRESSURE;

ANODE MAGNETRONS; CATHODIC POLYMERIZATION; OPPOSITE MAGNETRONS (OM); PARALLEL MAGNETRONS (PM);

PLASMA POLYMERIZATION;

EID: 0034272633     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1286548     Document Type: Article

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