Scanning probe (tunneling and force) microscopy in metrological problems of nanoelectronics

Russian Microelectronics

Volumn 26, Issue 6, 1997, Pages 365-377

  Arutyunov, P A ^a   Tolstikhina, A L ^b  

^a NATIONAL RESEARCH UNIVERSITY HIGHER SCHOOL OF ECONOMICS   (Russian Federation)

^b SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542283918     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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