Increasing the value of atomic force microscopy process metrology using a high-accuracy scanner, tip characterization, and morphological image analysis

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1540-1546

  Schneir, J ^a   Villarrubia, J S ^a   McWaid, T H ^a   Tsai, V W ^a   Dixson, R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001580938     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589135     Document Type: Article

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