Standardized procedure for calibrating height scales in atomic force microscopy on the order of 1 nm

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1228-1232

  Suzuki, M ^a   Aoyama, S ^b,i   Futatsuki, T ^b,j   Kelly, A J ^c   Osada, T ^c   Nakano, A ^d   Sakakibara, Y ^a   Suzuki, Y ^e   Takami, H ^f   Takenobu, T ^g   Yasutake, M ^h  

^a NTT CORPORATION   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c FUJITSU LABORATORIES LTD   (Japan)

^d SHARP CORPORATION   (Japan)

^e CANON INC   (Japan)

^f TOYO Corporation   (Japan)

^g OLYMPUS CORPORATION   (Japan)

^h SEIKO INSTRUMENTS INC   (Japan)

ⁱ Texas Instruments Japan Ltd   (Japan)

^j Japan Organo Co   (Japan)

more..

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343980752     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580272     Document Type: Article

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