Sample preparation for vertical transistors in DRAM

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 307-311

  Ruprecht, Michael W ^a   Wen, Shengmin ^b   Vollertsen, Rolf P ^b  

^a INFINEON TECHNOLOGIES   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL PROBING; FOCUSED ION BEAMS (FIB); TIME TO BREAK DOWN (TDDB);

ELECTRIC POTENTIAL; FAILURE ANALYSIS; GATES (TRANSISTOR); ION BEAMS; OXIDES; PHOTOEMISSION; POLYSILICON; SCANNING ELECTRON MICROSCOPY; TRANSISTORS;

DYNAMIC RANDOM ACCESS STORAGE;

EID: 1542270297     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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