Design of a MEMS acoustical beamforming sensor microarray

IEEE Sensors Journal

Volumn 2, Issue 6, 2002, Pages 617-627

  Chowdhury, Sazzadur ^a,b   Ahmadi, Majid ^a,b   Miller, William C ^a,b  

^a IEEE   (Canada)

^b UNIVERSITY OF WINDSOR   (Canada)

Author keywords

Acoustical sensor; Beamforming; Hearing instrument; Microarray; Microelectromechanical system (MEMS); Micropackaging

Indexed keywords

ACOUSTICAL SENSORS; BEAMFORMING; HEARING INSTRUMENTS; MICROARRAYS; MICROELECTROMECHANICAL SYSTEM (MEMS); MICROPACKAGING;

ACOUSTIC DEVICES; ACOUSTIC VARIABLES MEASUREMENT; DIGITAL SIGNAL PROCESSING; MICROELECTROMECHANICAL DEVICES; SENSORS;

ARRAYS;

EID: 1542268727     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2002.807773     Document Type: Article

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