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Surface Science

Volumn 579, Issue 2-3, 2005, Pages 197-214

Adsorption and reaction of N2H4 on Si(1 0 0)-2 × 1: A computational study with single- and double-dimer cluster models

(2) Wang, Jeng Han a Lin, M C a

a EMORY UNIVERSITY (United States)

Author keywords

Cluster model calculations; Hydrazine; Silicon

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; ANNEALING; DIMERS; HYDRAZINE; MATHEMATICAL MODELS; NITROGEN COMPOUNDS; PROBABILITY DENSITY FUNCTION; RAPID THERMAL ANNEALING; SILICON; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

CLUSTER MODEL CALCULATIONS; DISSOCIATIVE ADSORPTION; EXOTHERMICITY; VIBRATIONAL FREQUENCIES;

REACTION KINETICS;

EID: 15044348721 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/j.susc.2005.02.003 Document Type: Article

Times cited : (8)

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