Synchrotron radiation photoemission spectroscopy studies of the thermal nitridation of GaAs(100) with ammonia

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 192-196

  Huh, Chul ^a   Park, Seong Ju ^a   Ahn, Sook ^b   Han, Jeong Yeul ^b   Cho, Keum Jae ^b   Seo, Jae Myung ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11644309717     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589776     Document Type: Article

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