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Volumn 80, Issue 1-2, 1996, Pages 61-65
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Structure of TiN coatings
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Author keywords
Microstructure; Thin films; TiN; X ray diffraction
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Indexed keywords
ANISOTROPY;
CRYSTAL MICROSTRUCTURE;
HARDNESS;
ION BOMBARDMENT;
LATTICE CONSTANTS;
MAGNETRON SPUTTERING;
PHASE TRANSITIONS;
POLYCRYSTALLINE MATERIALS;
STRAIN;
THIN FILMS;
TITANIUM NITRIDE;
X RAY CRYSTALLOGRAPHY;
CRYSTALLOGRAPHIC ANISOTROPY;
GAS PRESSURE;
LATTICE DEFORMATION;
MICROSTRAINS;
PICOSTRUCTURE;
POLYCRYSTALLINE FILMS;
STRESS FREE MATERIALS;
TITANIUM COATING;
CERAMIC COATINGS;
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EID: 0030110197
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(95)02686-X Document Type: Article |
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Times cited : (30)
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References (10)
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