메뉴 건너뛰기




Volumn 32, Issue 3, 2002, Pages 327-331

Optical properties of AlN thin films obtained by reactive magnetron sputtering

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CRYSTAL STRUCTURE; EMISSION SPECTROSCOPY; MAGNETRON SPUTTERING; REFRACTIVE INDEX; SPUTTER DEPOSITION; THICKNESS MEASUREMENT; THIN FILMS; X RAY DIFFRACTION;

EID: 0036934773     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.