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Volumn 32, Issue 3, 2002, Pages 327-331
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Optical properties of AlN thin films obtained by reactive magnetron sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSORPTION;
CRYSTAL STRUCTURE;
EMISSION SPECTROSCOPY;
MAGNETRON SPUTTERING;
REFRACTIVE INDEX;
SPUTTER DEPOSITION;
THICKNESS MEASUREMENT;
THIN FILMS;
X RAY DIFFRACTION;
OPTICAL EMISSION SPECTROSCOPY;
ALUMINUM NITRIDE;
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EID: 0036934773
PISSN: 00785466
EISSN: None
Source Type: Journal
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (5)
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