The deepness enhancing of an AFM-tip induced surface nanomodification

Applied Surface Science

Volumn 243, Issue 1-4, 2005, Pages 138-142

  Sheglov, D V ^a,b   Latyshev, A V ^a,b   Aseev, A L ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

^b NOVOSIBIRSK STATE UNIVERSITY   (Russian Federation)

Author keywords

AFM; Local anodic oxidation; Nanostructuring; Surface nanomodification

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTRONIC EQUIPMENT; FREQUENCY MODULATION; LITHOGRAPHY; SILICON;

LOCAL ANODIC OXIDATION; NANOSTRUCTURING; SCANNING PROBE MICROSCOPY (SPM); SURFACE NANOMODIFICATION;

NANOSTRUCTURED MATERIALS;

EID: 14544292970     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.098     Document Type: Article

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