Atomic force microscopy of silicon stepped surface

Physics of Low-Dimensional Structures

Volumn 5-6, Issue , 2002, Pages 231-238

  Kosolobov, S S ^a   Nasimov, D A ^a   Sheglov, D V ^a   Rodyakina, E E ^a   Latyshev, A V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

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EID: 14544299470     PISSN: 02043467     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (9)