Synthesis of a-C:H films by plasma-based ion implantation using electron cyclotron resonance plasma with a mirror field and their tribological properties

New Diamond and Frontier Carbon Technology

Volumn 14, Issue 3, 2004, Pages 161-171

  Watanabe, Toshiya ^a   Yamashita, Nobuki ^a   Suzuki, Masahiro ^b   Ishihara, Masatou ^b   Ohana, Tsuguyori ^b   Yamamoto, Kazuhiro ^b   Tsuda, Osamu ^b   Tanaka, Akihiro ^b   Koga, Yoshinori ^b  

^a MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Carbon film; Chemical bonding; ECR plasma with a mirror field; Plasma based ion implantation; Tribological property

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; ELECTRON CYCLOTRON RESONANCE; FRICTION; INTERFACES (MATERIALS); ION IMPLANTATION; MATERIALS TESTING; PLASMAS; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; TRIBOLOGY; WEAR OF MATERIALS;

ELECTRON CYCLOTRON RESONANCE PLASMA; FRICTION TESTING; NEGATIVE VOLTAGE PULSES; PLASMA BASED ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

EID: 1442314688     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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