Plasma-based ion implantation and its application to three-dimensional materials

Surface and Coatings Technology

Volumn 136, Issue 1-3, 2001, Pages 1-6

  Yukimura, Ken ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ION IMPLANTATION; MAGNETIC FILTERS; PLASMA DENSITY; PLASMA SHEATHS;

PLASMA IMMERSION ION IMPLANTATION (PIII); PLASMA SOURCE ION IMPLANTATION (PSII); PLASMA-BASED ION IMPLANTATION (PBII);

PLASMA SOURCES;

EID: 0035254751     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01000-8     Document Type: Article

References (20)

1. J.R. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
2. B. Mizuno, I. Nakayama, M. Takase, H. Nakaoka, M. Kubota, 85 (1996) 51.
3. J.T. Scheuer, K.C. Walter, R.A. Adler, W.G. Home, 93 (1997) 192.
4. K.C. Walter, M. Nastasi, C. Munson, Surf. Coat. Technol. 93 (1997) 287.
5. R.J. Adler, R.J. Richter-Sand, E.J. Clark, C.W. Gregg, J. Vac. Sci. Technol. B17 (1999) 883.
6. K. Yukimura, K. Ohno, M. Koto et al., Surf. Coat. Technol. 103/104 (1998) 252.
7. M.M. Shamin, J.T. Scheuer, R.P. Fetherston, J.R. Conrad, J. Appl. Phys. 70 (1991) 4756.
8. S. Takechi, S. Shinohara, A. Fukuyama, Jpn. J. Appl. Phys. 38 (1999) 3716.
9. Y. Sakawa, N. Koshikawa, T. Shoji, Appl. Phys. Lett. 69 (1996) 1695.
10. M. Tuda, K. Ono, Proceedings of the 14th International Symposium on Plasma Chemistry, (1999) 867.
11. N. Sakudo, Nucl. Instrum. Methods Phys. Res. B21 (1987) 168.
12. S. Shinohara, Y. Miyauchi, Y. Kawai, Plasma Phys. Control. Fusion 37 (1995) 1015.
13. S. Shinohara, N. Matsuoka, T. Yoshinaka, Jpn. J. Appl. Phys. 38 (1999) 4321.
14. T. Shirakawa, H. Toyoda, H. Sugai, Jpn. J. Appl. Phys. 19 (1999) L1015.
15. K. Komachi, J. Vac. Sci. Technol. A11 (1993) 164.
16. K. Yukimura, K. Yoshioka, Y. Tani, Rev. Sci. Instrum., 71 (2000) (in press).
17. K. Yukimura, R. Isono, T. Monguchi, K. Ysohioka, J. Vac. Sci. Technol. B17 (1999) 871.
18. K. Akari, H. Tamagaki, T. Kumakiri, K. Tsuji, E.S. Koh, C.N. Tai, Surf. Coat. Technol. 43/44 (1990) 312.
19. S.Y. Chun, A. Chayahara, A. Kinimura et al., Jpn. J. Appl. Phys. 38 (1999) L467.
20. R. Miyano, H. Takikawa, K. Manabe, K. Shinsako, T. Sakakibara, Trans. IEE Jpn. 119-A (1999) 19 (in Japanese).